Mirrorcle Technologies MEMS Mirrors – Technical Overview

OVERVIEW Mirrorcle Technologies Gimbal-less Two-Axis Scanning MEMS Mirror Devices are based on proprietary ARI-MEMS fabrication technology initially developed through research projects at the Adriatic Research Institute (“ARI”) in Berkeley, CA. They provide very fast optical beam steering across two axes, while requiring ultra-low power. The mirrors deflect laser beams or images to optical scanning angles of up to 32° on each axis. Compared to the large-scale galvanometer-based optical scanners, these devices require several orders of magnitude less driving power: continuous full-speed operation of the electro-static actuators that drive mirror tip-tilt rotation dissipates less than 1 mW of power. Mirrorcle Technologies MEMS mirrors are made entirely of monolithic single-crystal silicon, resulting in excellent repeatability and reliability. Flat, smooth mirror surfaces are coated with a thin film of metal with high broadband reflectance. Smaller and medium mirror sizes are manufactured as integrated parts of the silicon MEMS chip, while larger mirrors are bonded onto actuators, allowing custom mirror sizes.